Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970773 | Apparatus and method for atomic layer deposition (ALD) | Pekka Soininen | 2024-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970773 | Apparatus and method for atomic layer deposition (ALD) | Pekka Soininen | 2024-04-30 |