Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more | 2024-09-17 |
| 12084763 | Microstructure control of conducting materials through surface coating of powders | Marc Shull, Hong P. Gao, Chandra Deshpandey | 2024-09-10 |
| 12060651 | Chamber architecture for epitaxial deposition and advanced epitaxial film applications | Tetsuya Ishikawa, Swaminathan Srinivasan, Kartik Shah, Ala Moradian, Manjunath Subbanna +2 more | 2024-08-13 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more | 2024-06-25 |
| 11974949 | Method for suppressing stray light, laser-surgical apparatus, optical observation device, and computer program | Frank Keib, Christian Beder | 2024-05-07 |
| 11867307 | Multi-piece slit valve gate | Shawn Thanhson Le, Ofer Amir, Hannie Thi Vo | 2024-01-09 |
| 11860016 | MEMS-based Coriolis mass flow controller | Dennis R. Smith, Sudhakar Gopalakrishnan | 2024-01-02 |