Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Patrick Warnaar, Grzegorz Grzela, Mohammadreza Hajiahmadi, Farzad Farhadzadeh +5 more | 2024-10-08 |
| 11966168 | Method of measuring variation, inspection system, computer program, and computer system | Antoine Gaston Marie Kiers, Jan-Willem Gemmink | 2024-04-23 |
| 11940740 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2024-03-26 |
| 11880640 | Systems and methods for predicting layer deformation | Chrysostomos BATISTAKIS, Sander Frederik Wuister | 2024-01-23 |