Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Eric Eva, Drew Chieda, Victor Antonio PEREZ-FALCON +1 more | 2024-10-15 |
| 12111581 | Method to manufacture nano ridges in hard ceramic coatings | Mehmet Ali AKBAS, Tammo Uitterdijk, Christopher Mason, David Hart PETERSON, Michael Perry +3 more | 2024-10-08 |
| 11988971 | Lithographic apparatus, substrate table, and method | Satish Achanta, Benjamin David DAWSON, Matthew Anthony Sorna, Iliya Sigal, Tammo Uitterdijk | 2024-05-21 |