Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Drew Chieda, Matthew Lipson, Victor Antonio PEREZ-FALCON +1 more | 2024-10-15 |
| 11987521 | Substrate for a reflective optical element | — | 2024-05-21 |
| 11874525 | Optical element and lithography system | — | 2024-01-16 |