Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174552 | Lithographic apparatus and electrostatic clamp designs | Marcus Adrianus Van De Kerkhof, Daniel Leslie Hall, Christopher Mason, Arthur Winfried Eduardus Minnaert, Johannes Hubertus Josephina Moors +1 more | 2024-12-24 |
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Eric Eva, Drew Chieda, Matthew Lipson +1 more | 2024-10-15 |
| 11892779 | Optical component and clamp used in lithographic apparatus | — | 2024-02-06 |