Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12111581 | Method to manufacture nano ridges in hard ceramic coatings | Mehmet Ali AKBAS, Tammo Uitterdijk, Christopher Mason, Matthew Lipson, Michael Perry +3 more | 2024-10-08 |
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Bruce Tirri, Ping Zhou, Elizabeth Stone, Mehmet Ali AKBAS, Ryan Mayer +1 more | 2024-01-30 |