Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887881 | Lithographic apparatus, substrate table, and non-uniform coating method | Bruce Tirri, Ping Zhou, David Hart PETERSON, Mehmet Ali AKBAS, Ryan Mayer +1 more | 2024-01-30 |