Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074052 | Forming mesas on an electrostatic chuck | Stanley Wu, Matthew Boyd | 2024-08-27 |
| 11915913 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2024-02-27 |