Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074052 | Forming mesas on an electrostatic chuck | Wendell Glenn Boyd, Jr., Matthew Boyd | 2024-08-27 |
| 11866821 | Substrate support cover for high-temperature corrosive environment | Shuran Sheng, Lin Zhang, Jiyong Huang, Joseph C. Werner, Mahesh Adinath Kanawade +3 more | 2024-01-09 |