Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027388 | Conical coil for rapid thermal anneal lamps | Vilen K. NESTOROV, Kaushik RAO | 2024-07-02 |
| 11915913 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Matthew J. Busche | 2024-02-27 |