Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915913 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2024-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915913 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2024-02-27 |