Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1027120 | Seal for an assembly in a vapor deposition chamber | Yao-Hung YANG, Eric Ruhland, Saurabh M. Chaudhari, Dien-Yeh Wu, Philip Wayne Nagle +4 more | 2024-05-14 |
| 11898245 | High throughput and metal contamination control oven for chamber component cleaning process | Chien-Min Liao, Chi-Feng Liu, Yi Nung Wu, Hsiu Yang, Yixing Lin +1 more | 2024-02-13 |