Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898245 | High throughput and metal contamination control oven for chamber component cleaning process | Chien-Min Liao, Chi-Feng Liu, Yi Nung Wu, Yixing Lin, Boon Sen Chan +1 more | 2024-02-13 |