Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898245 | High throughput and metal contamination control oven for chamber component cleaning process | Chien-Min Liao, Chi-Feng Liu, Yi Nung Wu, Hsiu Yang, Boon Sen Chan +1 more | 2024-02-13 |
| 11866821 | Substrate support cover for high-temperature corrosive environment | Shuran Sheng, Lin Zhang, Jiyong Huang, Joseph C. Werner, Stanley Wu +3 more | 2024-01-09 |