Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142475 | Sequential plasma and thermal treatment | Ning Li, Shuaidi Zhang, Mihaela Balseanu, Qi Gao, Rajesh Prasad +3 more | 2024-11-12 |
| 12112949 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell +4 more | 2024-10-08 |
| 12094709 | Plasma treatment process to densify oxide layers | Jung Chan Lee, Mun Kyu Park, Jun Seok Lee, Euhngi Lee, Kyu-Ha Shim +5 more | 2024-09-17 |
| 12014927 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell +4 more | 2024-06-18 |