Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11779871 | Exhaust module for wafer baking apparatus and wafer processing system having the same | BYUNG-IN KWON, Jong-Kill Lim | 2023-10-10 |
| 11581187 | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same | Jiyong Yoo, Jong-Kill Lim | 2023-02-14 |