Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693307 | Reticle pod for preventing haze contamination and reticle stocker having the same | BYUNG-IN KWON, Dae-Youp Lee | 2023-07-04 |
| 11605550 | Alignment system | Siwon Yang, BYUNG-IN KWON | 2023-03-14 |
| 11581187 | Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same | Jong-Kill Lim, Sungkun Jang | 2023-02-14 |