Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11779871 | Exhaust module for wafer baking apparatus and wafer processing system having the same | Jong-Kill Lim, Sungkun Jang | 2023-10-10 |
| 11693307 | Reticle pod for preventing haze contamination and reticle stocker having the same | Jiyong Yoo, Dae-Youp Lee | 2023-07-04 |
| 11605550 | Alignment system | Siwon Yang, Jiyong Yoo | 2023-03-14 |