Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651986 | System for isolating electrodes at cryogenic temperatures | Jonathan D. Fischer, Manohara Kumar | 2023-05-16 |
| 11557496 | Load lock with integrated features | Michael Blanchard, Brant S. Binns, Jordan B. Tye, D. Jeffrey Lischer | 2023-01-17 |
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, D. Jeffrey Lischer, James McLane, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |