Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, Steven M. Anella, D. Jeffrey Lischer, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |