Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11557496 | Load lock with integrated features | Michael Blanchard, Steven M. Anella, Brant S. Binns, Jordan B. Tye | 2023-01-17 |
| 11543296 | Method and apparatus for calibration of substrate temperature using pyrometer | Eric D. Wilson, Steven M. Anella, James McLane, Bradley M. Pomerleau, Dawei Sun | 2023-01-03 |
| 11545375 | Hybrid control system for workpiece heating | James D. Strassner, Bradley M. Pomerleau, Dawei Sun, Michael Paul Rohrer | 2023-01-03 |