Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Tomoki UMETSU, Tatsuya Hayakawa | 2023-11-28 |
| 11776836 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono | 2023-10-03 |
| 11756820 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono | 2023-09-12 |