Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Jumpei UEFUJI, Tomoki UMETSU | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Jumpei UEFUJI, Tomoki UMETSU | 2023-11-28 |