Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Jumpei UEFUJI, Tatsuya Hayakawa | 2023-11-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830755 | Electrostatic chuck and semiconductor manufacturing apparatus | Akihito Ono, Jumpei UEFUJI, Tatsuya Hayakawa | 2023-11-28 |