Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11616120 | Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate | Fuyuma Ito, Tatsuhiko Koide, Hiroki Nakajima, Naomi Yanai, Hakuba Kitagawa +1 more | 2023-03-28 |
| 11610789 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuhiro Sato, Hiroshi Fujita, Yoshinori Kitamura, Satoshi NAKAOKA | 2023-03-21 |