Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784064 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yasuhito Yoshimizu, Yuya Akeboshi, Fuyuma Ito | 2023-10-10 |
| 11616120 | Semiconductor substrate, method of manufacturing semiconductor device, and method of manufacturing semiconductor substrate | Fuyuma Ito, Tatsuhiko Koide, Hiroki Nakajima, Naomi Yanai, Tomohiko Sugita +1 more | 2023-03-28 |