Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11682568 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yuji Hashimoto, Hiroshi Fujita | 2023-06-20 |
| 11676828 | Semiconductor manufacturing apparatus and manufacturing method of semiconductor device | Shinsuke Muraki | 2023-06-13 |
| 11610789 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuhiro Sato, Hiroshi Fujita, Yoshinori Kitamura, Tomohiko Sugita | 2023-03-21 |