Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728188 | Semiconductor manufacturing device | Shinsuke Muraki, Hiroaki Yamada | 2023-08-15 |
| 11682568 | Substrate treatment apparatus and manufacturing method of semiconductor device | Satoshi NAKAOKA, Hiroshi Fujita | 2023-06-20 |