Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851752 | Method for forming silicon film and processing apparatus | Akari Matsunaga, Satoshi Takagi | 2023-12-26 |
| 11807938 | Exhaust device, processing system, and processing method | Rui KANEMURA | 2023-11-07 |
| 11587787 | Film forming method and film forming apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi | 2023-02-21 |