Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749530 | Method of removing phosphorus-doped silicon film and system therefor | Masahisa Watanabe | 2023-09-05 |
| 11587787 | Film forming method and film forming apparatus | Daisuke Suzuki, Hiroyuki Hayashi, Yutaka Motoyama | 2023-02-21 |