Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11807938 | Exhaust device, processing system, and processing method | Yutaka Motoyama | 2023-11-07 |
| 11658028 | Film forming method and film forming apparatus | Hiroyuki Hayashi | 2023-05-23 |