Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Nobuhiro Ogata, Jiro Higashijima | 2023-02-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Nobuhiro Ogata, Jiro Higashijima | 2023-02-07 |