Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715650 | Substrate processing apparatus and manufacturing method therefor | Yusuke Hashimoto | 2023-08-01 |
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Yoichi Tokunaga, Nobuhiro Ogata | 2023-02-07 |