Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742223 | Substrate processing apparatus | Yuji Kimura | 2023-08-29 |
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoichi Tokunaga, Nobuhiro Ogata, Jiro Higashijima | 2023-02-07 |