Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776105 | Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus | Yoshitaka Enoki, Tokio Toyama, Michihiro Takahashi, Takuya Mori | 2023-10-03 |
| 11721557 | Etching method | Tadashi MITSUNARI, Naotaka Noro | 2023-08-08 |