Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721557 | Etching method | Naotaka Noro, Tsuyoshi Moriya | 2023-08-08 |
| 11658008 | Film forming apparatus and film forming method | Munehito KAGAYA, Yusuke Suzuki, Shinya Iwashita | 2023-05-23 |