Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776105 | Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus | Tsuyoshi Moriya, Yoshitaka Enoki, Michihiro Takahashi, Takuya Mori | 2023-10-03 |