Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11681268 | Semiconductor manufacturing system, control device, and control method | Kenichi Kobayashi, Takashi Oe, Noriaki Kanaya | 2023-06-20 |
| 11567485 | Substrate processing system and method for monitoring process data | Nobutoshi TERASAWA, Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Fumiaki NAGAI +1 more | 2023-01-31 |