Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822319 | Semiconductor system | Kazushi Shoji, Motokatsu Miyazaki | 2023-11-21 |
| 11567485 | Substrate processing system and method for monitoring process data | Nobutoshi TERASAWA, Tomonori Yamashita, Takazumi Tanaka, Takehiro KINOSHITA, Fumiaki NAGAI +1 more | 2023-01-31 |