Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11567485 | Substrate processing system and method for monitoring process data | Nobutoshi TERASAWA, Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Takehiro KINOSHITA +1 more | 2023-01-31 |