Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769661 | Substrate processing method and substrate processing apparatus | Hirofumi Takeguchi, Kazuyoshi Shinohara, Suguen Lee | 2023-09-26 |
| 11712710 | Substrate processing apparatus and substrate processing method | Fumihiro Kamimura, Hiroshi Komiya, Nobuhiro Ogata | 2023-08-01 |