Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11712710 | Substrate processing apparatus and substrate processing method | Takahisa Otsuka, Hiroshi Komiya, Nobuhiro Ogata | 2023-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11712710 | Substrate processing apparatus and substrate processing method | Takahisa Otsuka, Hiroshi Komiya, Nobuhiro Ogata | 2023-08-01 |