Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769661 | Substrate processing method and substrate processing apparatus | Hirofumi Takeguchi, Takahisa Otsuka, Suguen Lee | 2023-09-26 |
| 11676835 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuki Kosai | 2023-06-13 |
| 11569086 | Substrate processing apparatus and substrate processing method | Kazuki Kosai | 2023-01-31 |
| 11551935 | Substrate processing method and substrate processing apparatus | Takashi Nakazawa | 2023-01-10 |