Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798819 | Liquid processing apparatus and liquid processing method | Yusuke Takamatsu, Taisei Inoue | 2023-10-24 |
| 11676835 | Substrate processing method and substrate processing apparatus | Hiroki Sakurai, Kazuyoshi Shinohara | 2023-06-13 |
| 11569086 | Substrate processing apparatus and substrate processing method | Kazuyoshi Shinohara | 2023-01-31 |