Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742232 | Substrate processing method and substrate processing apparatus | Yoshinori Ikeda, Shigeru MORIYAMA, Ryo Yamamoto, Takashi Uno | 2023-08-29 |
| 11688613 | Substrate processing apparatus and substrate processing method | Hiroaki Inadomi | 2023-06-27 |