Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735439 | Substrate processing system and method for supplying processing fluid | Yasuo Kiyohara, Satoshi Okamura | 2023-08-22 |
| 11688613 | Substrate processing apparatus and substrate processing method | Shota Umezaki | 2023-06-27 |