Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735439 | Substrate processing system and method for supplying processing fluid | Yasuo Kiyohara, Hiroaki Inadomi | 2023-08-22 |
| 11557492 | Substrate processing apparatus and control method thereof | Satoshi Biwa, Gentaro Goshi | 2023-01-17 |