Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594427 | Substrate processing apparatus and substrate processing method | Toru Ihara, Masami Yamashita | 2023-02-28 |
| 11557492 | Substrate processing apparatus and control method thereof | Satoshi Biwa, Satoshi Okamura | 2023-01-17 |