Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791695 | Electric actuator | Shinsuke Hirano, Tatsunori Shimizu | 2023-10-17 |
| 11742232 | Substrate processing method and substrate processing apparatus | Shota Umezaki, Shigeru MORIYAMA, Ryo Yamamoto, Takashi Uno | 2023-08-29 |